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This paper gives a guideline for preparation of anatase TiO 2 films by pulsed laser deposition (PLD) technique, and the mechanism of preferential formation of anatase is described. The TiO 2 films with different thicknesses, 50, 100 and 300 nm, were prepared on quartz-glass substrates by Nd:YAG pulsed laser deposition, and subsequently annealed in air at 500 and 1000 °C. Their structures...
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