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This study proposes a method for increasing hydrophobicity using a reactive ion etching (RIE) system. The aim was to study and optimize a surface with hierarchical structures. The effects of micropyramid and nanoneedle structures were investigated for improving superhydrophobicity on the Si surface. To investigate the effects of nanoneedle structures for hydrophobicity, RIE parameters such as the...
We produced a superhydrophobic surface by reactive ion etching and polytetrafluoroethylene coating of a silicon substrate. SF 6 /O 2 and a metal mesh were used for the etching, which produced pyramidal nanostructures on the substrate. The sputtering of the polytetrafluoroethylene thin film over the nanotextured substrate created a superhydrophobic surface with a water contact angle...
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