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Optical emission spectroscopy has been used to characterize diamond deposition microwave chemical vapour deposition (MWCVD) plasmas operating at high power density. Electron temperature has been deduced from H atom emission lines while H-atom mole fraction variations have been estimated using actinometry technique, for a wide range of working conditions: pressure 25–400hPa and MW power 600–4000W....
A surface wave (2.45GHz) driven, atmospheric plasma torch in air with a small admixture of water vapor (2%) is investigated as a source of exogenic NO. A 1D theoretical model of this source based on a self-consistent treatment of particles kinetics, gas dynamics, gas thermal balance, and wave electrodynamics is developed. Mass spectrometry is used to determine the relative NO(X) number density in...
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