Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2004 > 13 > 3 > 542 - 549
Journal of Microelectromechanical Systems > 2006 > 15 > 4 > 935 - 944
Journal of Microelectromechanical Systems > 2006 > 15 > 4 > 957 - 966
Journal of Microelectromechanical Systems > 2006 > 15 > 4 > 770 - 776
Journal of Microelectromechanical Systems > 2006 > 15 > 4 > 756 - 762
Journal of Microelectromechanical Systems > 2006 > 15 > 4 > 737 - 744
Journal of Microelectromechanical Systems > 2006 > 15 > 4 > 729 - 736
Journal of Microelectromechanical Systems > 2006 > 15 > 4 > 822 - 831
Journal of Microelectromechanical Systems > 2006 > 15 > 4 > 986 - 1000
Journal of Microelectromechanical Systems > 2006 > 15 > 4 > 871 - 878
Journal of Microelectromechanical Systems > 2006 > 15 > 4 > 879 - 889
Journal of Microelectromechanical Systems > 2006 > 15 > 4 > 912 - 926
Journal of Microelectromechanical Systems > 2006 > 15 > 4 > 745 - 755
Journal of Microelectromechanical Systems > 2006 > 15 > 4 > 777 - 785
Journal of Microelectromechanical Systems > 2006 > 15 > 4 > 763 - 769
Journal of Microelectromechanical Systems > 2006 > 15 > 4 > 1015 - 1024