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IEEE Transactions on Semiconductor Manufacturing > 2009 > 22 > 4 > 452 - 461
IEEE Sensors Journal > 2008 > 8 > 8 > 1422 - 1429
IEEE Transactions on Semiconductor Manufacturing > 2009 > 22 > 4 > 452 - 461
IEEE Sensors Journal > 2008 > 8 > 8 > 1422 - 1429