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Mechanism of a recently reported new etching method of transition metal using ethanol gas and oxygen and argon neutral beams at low temperature was investigated by first-principles calculation based on density functional theory. Tantalum etching was studied. It was found that adsorption of ethanol on both of tantalum oxide and metallic tantalum. Then “hydrogen movement” reaction can occur by argon...
An adsorption isotherm provides indirect information about the geometry of the host material and its interaction with the adsorbed fluid. This paper presents a critical study of the “inversion” of experimental data to elucidate desired information about this geometry. Using Ar and H2 as representative classical and quantum fluids and a carbon slit-pore geometry, we compare the accuracy of isotherms...
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