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Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1094 - 1100
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control > 2002 > 49 > 2 > 266 - 270
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1094 - 1100
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control > 2002 > 49 > 2 > 266 - 270