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Electronic Materials Letters > 2011 > 7 > 2 > 109-113
Journal of Microelectromechanical Systems > 2008 > 17 > 6 > 1315 - 1321
Electronic Materials Letters > 2011 > 7 > 2 > 109-113
Journal of Microelectromechanical Systems > 2008 > 17 > 6 > 1315 - 1321