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To realize a next generation strategy for Japanese agriculture and livestock husbandry, especially aiming at developing a high effective electronic management system for cow rearing farmers. We developed a rumen pH sensor which can implement a real-time monitoring of pH value in cow rumen with low power consumption and high accuracy. The prototype of pH sensor was fabricated and packaged, which can...
The reliability issue of dielectric charging in MEMS capacitive switches is discussed taking into account the present knowledge derived from the numerous papers on this topic. The weakness of the available charge injection model is pointed, the dependence of the material stoichiometry with film thickness resulting in lateral charge redistribution is discussed, the available assessment techniques are...
We propose the application of MEMS capacitive pressure sensor for continuous glucose monitoring in diabetic patients. Two electrically charged parallel plates separated by a suitable dielectric medium, situated inside a micro-chamber isolated from the external environment by a felicitous semi-permeable membrane constitute the fundamental portion of the device. Determination of glucose concentration...
This paper describes the developments of Bio-MEMS using fabric as the structural components. The use of fabrics for Bio-MEMS construction significantly simplifies the conventional fabrication process. In this paper we proposed a new fabrication process for fabrics-based Bio-MEMS. In addition, to the simple and low-cost fabrication process, stamping method offers a number of advantages which is less...
This paper presents a differential affinity sensor for continuous glucose monitoring. The sensor, based on microelectromechanical systems (MEMS) technology, consists of two magnetically driven vibrating diaphragms each situated inside a microchamber. The chambers respectively contain solutions of poly(N-hydroxyethyl acrylamide-ran-3-acrylamidophenylboronic acid) (PHEAA-ran-PAAPBA), a glucose-binding...
This paper reports a 0-level or wafer-level thin film packaging technology for MEMS using polycrystalline silicon-germanium (poly-SiGe) as the base material complemented with a metal seal. Hermetic packages with a cavity pressure below 0.3mbar are demonstrated on a SOI-based torsional-mode Si resonator. Monitoring the quality factor of these resonators revealed that the low pressure is retained for...
The influence of the lower electrode positions on the dynamic response of polysilicon MEMS resonators is studied and presented in this paper. The change in the frequency response of investigated MEMS resonators as function of the lower electrode positions is measured using a vibrometer analyzer. The decrease in the amplitude and velocity of oscillations if the lower electrode is moved from the beam...
Based on MEMS technology, electrodes surface modified technology, technique of immobilized enzyme and electrochemical detecting principle, the biosensors for detecting different biochemical parameters was fabricated based on MEMS electrodes modified nanoparticles. The multi-parameter measuring system is designed by using potentiostat for amperometric chemical sensors. The characters of the microsystem...
Size reduction in quadrupole mass spectrometers (QMSs) is an ongoing requirement driven by the needs of space exploration, portable, and covert monitoring applications. Microelectromechanical systems (MEMS) technology provides a method of achieving this size reduction. A quadrupole mass filter (QMF) is one component of a QMS and is suitable for microfabrication. MEMS manufacturing techniques are more...
This study demonstrates a novel monolithic TPMS (tire pressure monitoring systems) using CMOS MEMS processes. This TPMS monolithic integrates the 3-axis capacitive accelerometer, capacitive pressure sensor, and platinum (Pt) thermal-resist temperature sensor on a single chip. The TPMS has been successfully implemented using TSMC 2P4M process and our in-house post-process. The footprint of TPMS chip...
Wearable medical devices provide great convenience to the elderly for the monitoring of vital signs at home. This paper describes a novel long-term wearable vital signs monitoring system which can real-time measure physiological signs such as ECG, SpO2 (saturation of arterial oxygen) and systolic blood pressure. The proposed device is easy to wear, convenient to use and has almost no impact on the...
The integrated MEMS 1:N protection switch, scalable to M:N protection is proposed that allows monitoring of the redundant network element during normal operation and of the failed network element during protection for diagnostic purposes. Design and analysis of the MEMS based protection switch are presented
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