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IEEE Sensors Journal > 2015 > 15 > 7 > 3699 - 3710
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 2 > 301 - 311
IEEE Transactions on Plasma Science > 2013 > 41 > 12-2 > 3393 - 3401
IEEE Sensors Journal > 2015 > 15 > 7 > 3699 - 3710
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 2 > 301 - 311
IEEE Transactions on Plasma Science > 2013 > 41 > 12-2 > 3393 - 3401