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This paper presents the design simulations of MEMS based micro-cantilever beam made up of PDMS properties using COMSOL Multiphysics. The cantilever beam structure on fluid Channel has been simulated. The simulations results into the stress, displacement, The study brings out a novel methodology for detection of pathogens at minute level. The in-flow methodology enables the device to be used in online...
Electrostatically actuated MEMS emulsifying device with high flow rate has been proposed in this paper. In order to increase flow rate, electrostatic actuation across working fluid is adopted. Also large number of nozzle array is used for active droplet injection. Design of emulsifying device is optimized using FEM simulation for flow rate of 12.5 mL/min. The proposed device is fabricated and packaged...
In recent years, the research and development of piezoelectric pumps have become an increasingly popular topic. Minimization, structure simplification and stronger output became the focus of piezoelectric pumps research due to its possible application in MEMS technology. The valveless fishtailing piezoelectric pump with rectangular vibrator, neither a volumetric nor a rotating pump, was invented according...
In this paper, MEMS based polymeric drug delivery system for the treatment of cardiovascular disorder such as hypertension is presented. The major components of proposed system are drug delivery device, blood pressure sensor, flow sensor, electronic module, and power supply. Drug delivery device consists of piezoelectric actuator and reservoir integrated with side open polymeric microneedles. The...
The characteristics of microcantilevers vibrating in the in-plane flexural mode (also known as lateral vibration) in viscous liquid media are investigated. A numerical model was utilized to determine a correction to Stokes' solution for an infinite plate to obtain an analytical expression for the hydrodynamic forces acting on a laterally vibrating microcantilever as a function of both Reynolds number...
Separation of suspended particles with ultrasonic radiation force suggests advantages in MEMS. But there are some difficulties to position the outlets in MEMS ultrasonic separator based on one-dimensional (1-D) resonance. In this paper, a new type of MEMS ultrasonic resonance separator, where two anti-phase PZT-transducers are employed to generalize two-dimensional (2-D) normal mode, is exhibited...
In this paper a structure model of Micro Electro Mechanical System (MEMS) ultrasonic separator which is based on the two-dimensional normal vibration modes is presented and the resonance frequencies of the two-dimensional normal vibration modes and lateral standing wave are explored. First, in accordance with the theory of electricity-sound analogy, a two-dimensional equivalent network of the ultrasonic...
Separation of suspended particles with ultrasonic radiation force suggests advantages in MEMS. But there are some difficulties to position the outlets in MEMS ultrasonic separator based on one-dimensional resonance. In this paper, a new type of MEMS ultrasonic resonance separator, where two anti-phase PZT-transducers are employed to generalize two-dimensional normal mode, is analyzed. This new separator...
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