The conductive metal oxide of SrRuO 3 (SRO) thin films were deposited on Si(100) substrate by spin-coating with a chemical solution deposition (CSD). A stable precursor solution could be prepared from RuCl 3 .2H 2 O as a Ru source and Sr or SrCl 2 as a Sr source in 2-methoxyethanol. Highly (200)-oriented SRO films with a perovskite structure were obtained by the annealing at above 600 o C. As a result, relatively good SRO thin films could be deposited from a precursor solution of Sr and RuCl 3 .2H 2 O by annealing at 700 o C, showing a low resistivity of 1.1x10 - 3 Ωcm.