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Sub-micrometer thermal physics – An overview on SThM techniques1 Presented at the Twelfth Ulm-Freiberg Conference, Freiberg, Germany, 19–21 March 19971
The historical development and present state of the art of scanning thermal microscopy (SThM) – temperature profiling, thermography and other measurements of thermal parameters – in the sub-μm range and the relevant thermal sensors are reviewed. The paper proposes a classification scheme for the various experimental arrangements of STM and AFM based SThM's. Limitations of the SThM technique and future prospects are briefly discussed.