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A miniaturized pressure-sensing microsystem targeting intracranial pressure monitoring is presented. The system takes full advantage of Invensense MEMS-CMOS process to heterogeneously integrate the sensor and interface. This integration type requires no fabrication postprocessing and results in sub-pF sensor-interface parasitic interconnection capacitance $C_{p}$ which is an order of magnitude smaller...
Ultra-low power, miniaturized pressure sensors have attracted renewed interest in recent years thanks to emerging applications in altimetry as well as intra-ocular and intracranial pressure monitoring. The energy efficiency of these systems is however often limited by MEMS-CMOS interconnection parasitics. In this work, we employ a commercially-available MEMS-CMOS process designed for inertial sensors...
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