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In this paper, we present positionable photonic waveguide arrays that are developed for optical chip-to-chip alignment. Partly suspended photonic structures, based on the Si3N4/SiO2 material platform, are equipped with thermal actuators enabling the free end of the structures to be positioned with submicrometer accuracy. A finite-element model is developed to provide insight in the way the design...
In the manufacturing of photonic packages, the alignment of the components must often meet strict precision demands. For several applications, sub-micrometre alignment must be achieved, and this precision needs to be maintained once the components are aligned. In our research we explore the use of micro-fabrication technology as the enabler for reaching sub-μm alignment precision. Two main concepts...
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