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This paper addresses the design and manufacturing of small-scale square planar coils with inductance densities ranging from 2 to 19 $\mu \text {H}\cdot \text {mm}^{-2}$ . The design strategy is based on both analytic formulas and finite-element method. Two different manufacturing techniques, based on copper and aluminum, respectively, are used for the coils fabrication, and the key aspects as well...
This paper addresses the modeling of a three-phase electromagnetic MEMS generator. First, the differential non-linear equations that govern the electrical and mechanical dynamics are derived. An existing device is taken as a case study, and different strategies (analytical calculation, FE analysis or direct measurement) are used in order to obtain its characteristic parameters, which are then introduced...
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