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This paper presents the integration of piezoelectrically actuated flexural plate wave devices in a custom designed fluidic cell for biosensing in liquid. The flexural plate wave devices have a wavelength of 60 μm with an antisymmetric A0 mode analytically predicted to occur at 45MHz. The flexural plate wave devices and fluidic cell are used to measure protein adsorption from solution. As a biosensing...
This paper presents a comparison of several piezoelectrically driven MEMS flexural plate wave (FPW) resonators, all with the electrical interfacing located on the top of the device and fully isolated from the fluidic interface and detection surface on the back of the device, in order to avoid mutual interference. The devices to be compared include devices designed to have wavelengths of 60μm and 100μm,...
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