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One route to the improvement of thermoelectric material performance is nanostructuring. Herein, BiSb thin films are grown by molecular‐beam epitaxy on two types of InP(001) substrate: flat epiready wafer, and nano‐patterned by ion bombardment and annealing (IBA). The effects of IBA on InP substrate are presented, and the structural and electrical properties of the BiSb films are measured. BiSb films...