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This paper presents a three-dimensional (3-D) flexible micro light emitting diode (μ-LED) array for optogenetics. The array integrates individually addressable μ-LED chips with out-of-plane polymer-based microscale waveguides for deep brain optical stimulation. SU-8 waveguides were fabricated using a backside exposure method. A wafer-level assembly technique was demonstrated, which permits large scale,...
This paper reports on the design, fabrication and characterization of an innovative silicon-based neural probe with optical functionality. This so-called optrode is intended as an ultracompact tool for optogenetic applications in neuroscientific research. Beside platinum microe-lectrodes for electrical recording applications, bare laser diode (LD) chips combined with waveguides (WGs) implemented in...
A new concept of “Cell Fatigue Test” is proposed. By reciprocating a cell across the throat of a micro channel repeatedly, the dynamic behavior of cell deformation is measured. We define a new index of fatigue life of cells as the number of reciprocatory motions leading to the prescribed recovery ratio. The test system is composed of a piezoelectric (PZT) actuator, a high speed vision sensor and a...
This paper presents electrokinetically based microfluidic integration of isolation and amplification of target-binding nucleic acids. A microfluidic device is used that consists of two microchambers for nucleic acid isolation and amplification connected by a microchannel filled with agarose gel. In the device, target-binding DNA strands are isolated and amplified on surfaces while gel-based electrophoresis...
This paper demonstrates the dynamic stressing of viscous liquids in microfluidic channels. An infrared laser pulse is focused within the testing liquid in a microfluidic channel and a spherical shock wave near an air-liquid interface is created. The shock is reflected as a tension wave by the free surface due to the acoustic impedance mismatch. The displacement of the free surface within hundred nanoseconds...
Textile-enabled interfacial microfluidics, utilizes the capillary force generated by fibrous hydrophilic yarns (e.g., cotton) to drive biological reagents, has been extended to various biochemical analyses recently. However, the restricted capillary-driving mechanism persists to be a major challenge for continuous and facilitated biofluidic transport. In this abstract, we have first introduced a new...
Microfluidics is a field that utilizes channels on the micrometer scale to control minute fluid quantities with great spatiotemporal resolutions. Oxygen and chemical gradients are often used in microfluidic devices to observe aero-taxis and chemo-taxis of the seeded cells of interest. A microfluidic device that displays chemical and oxygen gradients perpendicular to each other in an X- to Y-axis fashion,...
Optically-induced dielectrophoresis (ODEP) has been widely used for manipulation of micro particles and cells. However, it requires a complicate medium replacement process before one could manipulate cells. For instance, 0.2M sucrose was used to generate enough ODEP forces for cell manipulation when the cells could be centrifuged to get rid of the original solution Dulbecco's modified eagle medium...
We present DropBot, a modular and extensible Digital Microfluidic (DMF) control instrument, and demonstrate compensation for parasitic capacitance and amplifier-loading effects, both critical to precise control of actuation voltage. We highlight quantitative metrics that are dynamically calculated by the system, including impedance, instantaneous drop velocity, and electrostatic driving force. We...
We developed a multi-color microfluidic organic light emitting device, which consists of liquid organic light emitting diodes (OLEDs) and electrochemiluminescence (ECL) devices. A 3 × 3 matrix of emitting pixels was fabricated in SU-8 microchannels sandwiched between polyethylene naphthalate (PEN) and glass substrates with indium tin oxide (ITO) anode and cathode pairs. Liquid organic semiconductor...
To high-performance detection of ultra-low concentration explosive vapor, we develop resonant microcantilever sensors by using a nano sensing material of functionalized GO/Au-NPs (gold-nanoparticles in situ grown on graphene-oxide sheet). To achieve specific-modification for fine selectivity and enlarge graphene surface-area for fast capturing the gas-molecules, surface-modified graphene-oxide sheets...
A simple and large-scale fabrication technique for three dimensional structure arrays using a photolithography process was applied to realize an array of high-aspect-ratio metallic fins. The fin array enables light confinement between the high-aspect-ratio fins, thus generating optical vortices. The light confinement between the fins produces sharp dips in the reflection spectrum of the array. We...
We have successfully demonstrated the fabrication of piezoelectric rubber films and their applications in heartbeat sensing and human energy harvesting. To realize the desired stretchability and electromechanical sensitivity, cellular PDMS structures with micrometer-sized voids are internally implanted with bipolar charges, which are secured by PTFE surface coating. The resulting composite structures...
In this study, we developed lead-free (K, Na)NbO3 (KNN) based energy harvesters using impact of the metal ball. A metal ball was put in a built-in cylindrical cavity to perpendicularly impact the KNN/Si cantilever. Due to this impact, free oscillation of the cantilever was induced. This device can operate at low and wide frequency range of 20–190 Hz, and is suitable for the energy harvesting from...
This paper deals with a fully batch-processed MEMS electrostatic Vibration Energy Harvster (e-VEH) having a half-power frequency bandwidth of more than 30 % thanks to the combination of electrostatic and mechanical non-linearities. The electromechanical transducer is made of bulk-silicon gap-closing interdigited combs with a trapezoidal cross section. Up to 2.2 μW have been harvested at atmospheric...
We report a paper-based microbial fuel cell (MFC) generating a maximum power of 5.5 μW/cm2. The MFC features (1) a paper-based proton exchange membrane by infiltrating sulfonated sodium polystyrene sulfonate and (2) micro-fabricated paper chambers by patterning hydrophobic barriers of photoresist. Once a sample was added to the device, a current of 74 μA generated without any startup time. This paper-based...
This paper presents a MEMS-based electromagnetic (EM) energy harvester for low frequency and low acceleration vibrations. The harvester is an improved version of [1], which operates with the frequency up conversion (FupC) principle. The former structure was composed of a low-frequency diaphragm carrying a magnet and 16 high-frequency cantilevers with coils. In this work, the phase difference between...
This paper presents the characterization of an energy harvester using a piezoelectric diaphragm as the vibration energy conversion microstructure. The diaphragm containing the spiral electrode operates in the d33 mode. The energy harvesting performance of the diaphragm was characterized. The optimal resistance load and the working frequency were characterized. The resonance tuning and the energy harvesting...
This paper reports a new type betavoltaic (BV) microcell based on intrinsic p-type semiconductive single-walled carbon nanotubes (s-SWNTs). Our device composes of Au and Ti asymmetrical electrode pairs with s-SWNTs laid over them forming Schottky junction with Ti and ohmic contact with Au. SWNT bundles were self-assembled between Au and Ti electrodes by Dieletrophoretic (DEP) technique, and metallic...
We present a 0.6 mm diameter, 20 μm thick epitaxially-sealed polysilicon disk resonator gyro (DRG). High Q (50,000) combined with electrostatic mode-matching and closed-loop quadrature null performed by dedicated electrode sets enables a scale-factor of 0.286 mV/(°/s) and Angle Random Walk (ARW) of 0.006 (°/s)/√Hz. Without precise control of temperature, the minimum Allan deviation is 3.29 °/hr.
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