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Herein, the water vapor transmission rate (WVTR) of aluminum oxide (Al2O3) films on polyethylene terephthalate (PET) substrates is investigated and is focused on the impact of the film defects on the transmission rate. The aluminum oxide films are prepared on PET substrates by magnetron sputtering, and the effects of the film thickness, sputtering power, temperature, and bias voltage on the WVTR...
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