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Pressure sensor is a wide and matured application in the field of sensing and actuation. With respect to its advancements and its application at remote areas improvise the concept of self powered sensors. As supplying power to remote sensor is hectic one and battery replacement is not a convenient solution. To its advancements, without compromising the sensitivity as well as to explore the energy...
In this paper, we propose a corrugated diaphragm applied to the fiber optic pressure sensor which needs a wide sensing range and a large deflection. The corrugated diaphragm can effectively improve the sensitivity of the sensor has been proved by ANSYS simulation. The stress concentration is weakened after the silicon is chamfered into corrugated diaphragm by isotropic etching process. The sensitivity...
Piezoelectric micromachined ultrasonic transducer (pMUT) gains increasing interests from researchers. It overcomes the inherent shortcomings of conventional bulk ultrasonic transducers such as acoustic impedance mismatching. In addition, pMUT does not require the extremely large input voltage as capacitive micromachined ultrasonic transducer (cMUT), which is potential to be integrated into portable...
In this paper, a parametric analytical and simulation solution for MEMS based pressure sensor is proposed. The principle of the paper is to design, obtain the results with the simulation using MATLAB programming for a square/rectangular diaphragm deflection. In order to achieve better sensor performance, a parametric analysis is performed to evaluate the system output sensitivity of the pressure sensor...
This paper describes a comparative study of sensitivity and non-linearity of conventional and bossed diaphragm piezoresistive pressure sensor along with a performance enhanced design. The proposed structures take into consideration corner compensation to avoid distortion of the mesa structure during fabrication of bossed diaphragm structure using wet bulk micromachining. Optimum piezoresistors locations...
Processes that define the cantilever sensor from the front side of the wafer are designed to release the stress of the buried oxide layer and top silicon layer. This approach can be applied to enhance the performance of all the cantilever-based sensors. Then, a novel cantilever array sensor was microfabricated for precise bio-marker detection.
A piezoelectric MEMS with wake up function, Power down interrupt generator (PDIG), for inertial sensor systems is reported. The aluminum nitride based MEMS generates electric signals intrinsically in result of an inertial accelerations. The PDIG is optimized for maximum charge and voltage sensitivity. The charge sensitivity for a single electrode designed PDIG is measured with 40.1 pC/g and the maximum...
This paper presents the Modeling of Silicon capacitive pressure sensor for biomédical applications. Using the Micro Electro Mechanical Systems (MEMS) technology, MEMS sensors are widely used in biomédical applications due to its advantages of miniaturization, low power consumption, easy to measurement and telemetry. This work demonstrates the design of MEMS based capacitive pressure sensor using finite...
In the present paper, the design and simulation of square diaphragm, MEMS piezoresistive pressure sensor for intracranial application has been presented. The pressure sensor design presented in this paper consists of a carbon nanotube (CNT) suspended on a square and slotted shaped diaphragm as piezoresistor. The slot was added into the design of the square diaphragm to reduce the residual stress and...
In this paper, the design and fabrication techniques of a differential pressure sensor used in precision air data module (ADM) are described, and its performance test results are presented. A differential pressure senor for an ADM detects the differential pressure between static and total pressure, which can cover differential pressure of 0~20psi range with less than 1% accuracy. In order to satisfy...
The paper presents a piezoresistive absolute micro-pressure sensor for altimetry. This investigation includes the design, fabrication and testing of the sensor. An improved structure is studied through incorporating sensitive beams into the bossed-diaphragm structure. By analyzing the stress distribution of sensitive elements using finite element method (FEM), the configuration shows an enhanced sensitivity...
In this paper, the design and analysis of diaphragm based Micro-Electro-Mechanical Systems (MEMS) sensor for environmental applications is presented. Performance parameters like the maximum induced stress, deflection and sensitivity of the diaphragms have been compared using the INTELLISUITE software. In order to increase the sensitivity of pressure sensor, the membrane needs to be either thin or...
Tsunami is a large scale, short duration vertical displacement of water column. Tsunami results in a pressure change in the sea bed. The Tsunami warning system (TWS) consist of a series of sensors which detect the change in pressure at the sea bed when tsunami waves are generated. Micro electro mechanical system based silicon pressure sensors have undergone a significant growth in the last few years...
Micro Electro Mechanical System pressure sensors have been simulated with different structures for obtaining wider operation range with better sensitivity. The performance has been simulated and analyzed for silicon and SOI (Silicon-on-Insulator) pressure sensors. The performance of silicon and SOI pressure sensor at a given pressure and temperature are compared. Different diaphragms structures, were...
The application of MEMS to the measurement of pressure is a mature application of micromachined silicon mechanical sensors. The present paper describes the design and simulation of surface micromachined piezo resistive type pressure sensor for enhanced sensitivity. The principle of the sensing mechanism is based on the deflection of sensing silicon nitride diaphragm. In order to achieve better sensor...
This paper presents an electrostatically-driven and capacitively-sensed resonant pressure micro sensor. The device was fabricated based on a SOI wafer requesting only 2 masks and simplified micro-fabrication steps including DRIE, sputter and wet etching. The sensor was quantified by an open loop system, producing a Q-factor higher than 10430 in vacuum (less than 0.5 Pa). The resonant frequency was...
In this paper the silicon micromachined heat flux sensor is shown. The full model of a heat flux sensor with the built in heater is presented. Temperature distribution in complex 3D model of heat flux sensor is received. Sensor models with different forms of a heater are described. The comparative analysis of the received results is carried out.
The paper describes a conceptual platform development, including design, simulation and manufacture in nanoporous biomedical and chemical sensor applications. We exploit anodic aluminum oxidation (AAO) technology to produce an excellent nanoporous surface for fast gas detection, and combine with micro-electromechanical systems (MEMS) process to implement micro-sized devices with low power consumption...
In this work, the authors present the new design of MEMS high-sensitivity piezoresistive cantilever. The prospect is to develop the tactile sensor for space mission. The finite element method with parametric design, carried out using CoventorWare2008, was applied to obtain the most advantageous performance by optimizing shape and geometrical dimension of both cantilever and piezoresistor. The sensor...
This paper presents the optimized design of membrane dimension and piezoresistors position to obtain a high performance of piezoresistive pressure sensor. The designs have been simulated by finite element analysis (FEA). For achieving high sensitivity and good linearity of pressure sensor with a measurement span of 4 MPa, we find that 25 μm thick and diameter of 600 μm for the membrane is required...
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