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This paper describes a MEMS based stochastic sensor, which will be used in low S/N environments like high temperature plants. The mass which vibrates between two counter electrodes by white noise voltage is “pulled-in” to either of the counter electrodes by applying pulse voltage to the mass. The direction of the pull-in is determined stochastically, and the probability that the mass is pulled in...
In this study, we describe the design and fabrication of polymer (SU-8) cantilever with integrated Full-bridge strain sensor. Changes in the surface stress on the SU-8 cantilever are detected by integrated Au strain sensors. Results showed that the full-bridge integrated SU-8 cantilever provides much higher sensitivity than those of conventional type cantilever. The fabricated SU-8 cantilever having...
In this paper, a micro/nano displacement sensor for PZT actuator which could measure the minute displacement in micron or nanometer level has been proposed. This paper focus on the whole process of this novel sensor from the working principle, parameter determination to the FEM simulation and so forth. This sensor can enlarge the displacement of the PZT by utilizing the lever principle and the strain...
Planter force plays an important role in the gait analysis and other biomedical applications. The paper presents a study on the designing of a new MEMS (Micro Electro-Mechanical system) force sensor for plantar force measurement. This force sensor consists of a metal elastic element and a MEMS strain gauge realized through SOI (silicon on insulator) technology. The process of design and fabrication...
We propose a force sensor based on gold nanoparticles, which enable optical detection of force by measurement of the scattering light spectrum. Gold nanoparticles were dispersed on an elastomer sheet. The scattering spectrum changes due to strain were observed to investigate applicability of the sensor to force measurement. The force deforms the elastomer sensor body, and increases the interparticle...
Micro displacement measurement of the PZT actuator is a micro sensor which could measure the minute displacement in micron or nanometer level. In general, the sensor is required to accommodate little space in order to save the room of measuring device. In this paper, a mechanical micro displacement sensor with smaller volume has been proposed. This paper focus on the whole process of this novel sensor...
A novel generation of micro/nano displacement sensor for PZT actuator which could measure the minute displacement in micron or nanometer level has been performed in this paper. In general, the former two generations of sensor at IIM have been fabricated and tested successfully. In this paper, a new generation micro/nano displacement sensor with higher resolution has been proposed. This paper focus...
A novel nanomechanical cantilever sensor integrated with photonic crystal (PC) resonator is investigated computationally in this study. A U-shaped PC waveguide with a nanocavity resonator located at the edge of a suspended cantilever can be applied to detect cantilever bending in solution. The detection limit of this nanomechanical cantilever sensor operated in water is better than that of the same...
Micro displacement measurement of the PZT actuator is a micro sensor which could measure the minute displacement in micron or nanometer level. In general, the sensor is required not to accommodate much space in order to save the room of measuring device. In this paper, a mechanical micro displacement sensor with smaller volume has been proposed. This paper focus on the whole process of this novel...
Tactile metrology with high-aspect-ratio micro holes was addressed using extremely slender piezoresistive micro cantilever sensors operated under axial loading. Linear strain-displacement characteristics were observed at small axial displacements. From noise and non-linearity measurements the resolution and uncertainty of the cantilever sensors were determined to ap 1 nm and < 10 nm, respectively,...
A wind velocity sensor using the torque of cantilever to measure the velocity of wind is presented in this paper. It consists of a thin silicon plate and two short cantilevers which connect with the plate and silicon substrate and will bend when wind blow to the plate. The wind velocity is obtained by measuring the strain caused by the deflection of the cantilevers. The designed sensor was simulated...
The elastic body structure of six-axis force sensor based on the double layer E-type membrane has been used in the normal situation maturely. In this paper, the possibility of the same elastic body structure used in the micro-operation is discussed. The working principle of the sensor structure is introduced firstly, and the static and dynamic characteristics of the elastic body are obtained by finite...
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