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This review surveys recent developments of DNA nanotechnology related to its applications in nanoelectronics industry. The authors start with a brief introduction of DNA nanostructures, followed by a focused discussion of various DNA‐based fabrication approaches that are relevant to the semiconductor industry, including DNA‐based doping of semiconductor materials, DNA‐based fabrication of nanostructures...
The development of novel doping strategies compatible with high‐resolution patterning and low cost, large‐scale manufacturing is critical to the future development of electronic devices. Here, an approach to achieve nanoscale site‐specific doping of Si wafer using DNA as both the template and the dopant carrier is reported. Upon thermal treatment, the phosphorous atoms in the DNA diffuse into Si wafer,...
This Concept provides an overview of recent developments of DNA‐based nanofabrication and discusses its potential applications in the area of surface engineering. The first part of the paper discusses the strength and limitations of existing DNA‐based nanofabrication methods. The second part highlights several examples of surface engineering applications involving nano‐ and microscale surface textures...
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