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An 8-pixel quartz crystal resonator array with a fundamental resonance frequency of 73 MHz has been designed and fabricated. We established a protocol for selectively functionalizing the surface of resonator array via electrochemical desorption. The creation of hydrophobic and hydrophilic surface with methyl terminated and carboxylate terminated alkanethiols is characterized by Fourier transform spectroscopy...
An 8-pixel micromachined quartz crystal resonator array with a fundamental resonance frequency of 66 MHz has been designed, fabricated, and tested. A compact impedance-spectrum-analyzer electronic interface has been developed and combined with the quartz resonator array to form the biosensing system. The sensor array was calibrated using water-glycerol solutions, and the performance was found to be...
This paper presents the results of electrochemical calibration experiments performed on micromachined quartz gravimetric sensors. The absolute mass sensitivity of bulk acoustic quartz crystal microbalance (QCM) can be improved into the sub-10-12 g range upon miniaturization of the resonator thickness and area. Using plasma etching, we have fabricated miniaturized QCMs with thicknesses of ~29 mum and...
We report the design and fabrication of a micromachined quartz crystal balance (QCM) array for self assembled monolayers (SAMs) and protein adsorption studies. The microQCM was fabricated using recently developed inductively coupled plasma etching process for quartz to realize resonators with 60 mum thickness and electrode diameters of 0.5 mm. The reduction in the thickness and lateral pixel size...
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