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Different ion species deliver a different material sputtering yield and implantation depth, thus enabling focused ion beam (FIB) fabrication for diverse applications. Using newly developed FIB milling with double charged $$\hbox {Au}^{2+}$$ Au 2 + and $$\hbox {Si}^{2+}$$ Si 2 + ions, fabrication has been carried out on Au-sputtered films to define arrays of densely packed...
Scanning near-field optical microscopy (SNOM) achieves a resolution beyond the diffraction limit of conventional optical microscopy systems by utilizing subwavelength aperture probe scanning. A problem associated with SNOM is that the light throughput decreases markedly as the aperture diameter decreases. Apertureless scanning near-field optical microscopes obtain a much better resolution by concentrating...
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