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Due to reasons like higher flexibility demands, smaller lot sizes in production, and tool upgrades leading to higher throughputs, existing automated material handling systems are facing ever rising requirements. At the same time, the potential to upgrade transport system hardware is limited due to technical reasons as well as its interconnected nature. This paper, therefore, focuses on new possibilities...
Integration of transport system information into Manufacturing Execution System (MES) dispatching rules is not yet standard practice. Yet, it could be helpful in several areas of a semiconductor fabrication plant. For example, to react to system failures. Even in fully-automated manufacturing facilities, the MES dispatches production material with consideration of tool utilization and lowest cycle-time...
It is well-known that semiconductor manufacturing is one of the most complex types of production. Consequently, making the right decisions in order to get the optimum output of a semiconductor fab is quite challenging. For that reason, sophisticated discrete event simulation studies may be seen as a kind of magic tool for fab managers to face the ever-increasing complexity. But building complex dynamic...
Due to higher flexibility demands, smaller lot sizes in production, and tool upgrades leading to higher throughputs existing, Automated Material Handling Systems are facing rising requirements. At the same time, the potential to upgrade transport system hardware is limited due to technical reasons as well as its interconnected nature. This paper, therefore, focuses on the subsequent challenges regarding...
Usually simulation studies of automated material handling systems of semiconductor fabs are extremely time consuming. This is due to the high detail of models used for investigations which are partly provided by transportation system suppliers. These models only provide poor possibilities for adjustment and are computationally expensive. The article will address these issues by proposing an adjustable...
The method presented in this paper is based on deducing a network graph from an automated material handling system in order to utilize algorithms from graph theory. An optimization process is built on this network structure enabling an improvement of AMHS system performance prior to employment of dynamic simulations. Run time in a static simulation is significantly shorter than that of dynamic simulations,...
As companies grow their capacity in multiple buildings there are increasing challenges with the automated material handling systems (AMHS) used to transport the wafers between two or more facilities. In some cases, the links used to perform these transports can become a constraint for the entire system. The problem grows more difficult as the expansion plan extends further into the future, making...
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