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Due to reasons like higher flexibility demands, smaller lot sizes in production, and tool upgrades leading to higher throughputs, existing automated material handling systems are facing ever rising requirements. At the same time, the potential to upgrade transport system hardware is limited due to technical reasons as well as its interconnected nature. This paper, therefore, focuses on new possibilities...
Integration of transport system information into Manufacturing Execution System (MES) dispatching rules is not yet standard practice. Yet, it could be helpful in several areas of a semiconductor fabrication plant. For example, to react to system failures. Even in fully-automated manufacturing facilities, the MES dispatches production material with consideration of tool utilization and lowest cycle-time...
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