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A fully automatic test system for characterizing advanced probe cards able to probe on large-array fine-pitch micro-bumps (such as JEDEC's Wide-I/O Mobile DRAM interfaces [1, 2]) has been specified, developed, installed, and brought to a full-operational state. The system is based on a Cascade CM300 probe station from FormFactor and National Instruments PXI test instrumentation and complemented by...
Stacking singulated dies is an efficient way to create die stacks; IMEC uses this so-called die-to-die (D2D) stacking approach often to manufacture small to medium volumes of test chips. There is a need to perform a post-bond test on still-unpackaged (‘bare’) D2D stacks, if only to avoid unnecessary packaging costs. This paper presents an approach to perform automatic stepping and probing on arrays...
In order to obtain acceptable compound stack yields for 2.5D- and 3D-SICs, there is a need to test the constituting dies before stacking. The non-bottom dies of these stacks have their functional access exclusively through large arrays of fine-pitch micro-bumps, which are too dense for conventional probe technology. A common approach to obtain pre-bond test access is to equip these dies with dedicated...
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