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In this study, the influence of a temperature annealing process on the crystallographic orientation and sheet resistance of Pt/Ti films is investigated. Varying parameters are the annealing temperatures ranging between 450°C and 700°C and the atmosphere of the annealing process, which consists of either air, forming gas and argon gas. The thickness of the Pt/Ti film and the time of the annealing process...
Ultrasmall InGaAsP optical modulators were realized using a photonic crystal waveguide/nanocavity with a small-capacitance p-i-n junction and the Franz-Keldysh effect. Eye patterns reaching 56 Gb/s and a record-low charging energy of <100 aJ/bit were evaluated.
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