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Presents the introductory welcome message from the conference proceedings. May include the conference officers' congratulations to all involved with the conference event and publication of the proceedings record.
"Smart" cars, houses, offices, cities, etc. require increasingly large variety of sensors and associated electronics. This paper describes T SMC's activities in motion, pressure, optical and bio sensors that we hope will help transform "smart everything" into an "intelligent world" we will live in.
Over the past few decades both micro/ nanofabrication and microfluidics technologies have been crucial for the rapid development of Lab on a Chip systems. Here we present a few examples of this. Firstly, a capillary electrophoresis system on chip for blood analysis will be presented. Secondly, we show how nanostructures enable new chemical sensors and how they can be exploited to obtain highly sensitive...
Robotic networks of platforms carrying physical, chemical, and biological sensors that can monitor basic metabolic processes are required to observe ocean health. The sensors must operate for the 5 to 10 year period between research vessel visits with no direct human intervention and little or no chance for sensor recalibration. The sensors and the platforms that carry them must operate from the surface...
An implantable acoustic transducer is crucial for a completely implantable cochlear implant (CICI). This paper presents a miniaturized multichannel aluminum nitride (AlN) transducer designed to fit inside a guinea pig cochlea and act as a front end of a CICI. The transducer, fabricated using microelectromechanical systems techniques, has four piezoelectric bimorphs to produce broadband enhanced sensitivity...
This paper presents the design, fabrication and characterization of CMOS-based neural probes with a densely-packed electrode array. A hierarchical addressing scheme is implemented in the system which allows to integrate up to 1600 recording sites (17×17 μm2) arranged in 50 blocks of 32 electrodes each along a 100-μm-wide and 10-mm-long probe shaft. The electrodes within each block have a vertical...
This paper reports improvements of atomic force microscopy (AFM) mass spectrometry (MS), in which ∼1 attoliter of analyte is desorbed by a heated AFM cantilever tip and analyzed with a mass spectrometer. Decoupling the AFM sampling apparatus from the MS system enabled analysis of the microscale transport physics independent of analyte ionization efficiency. Using this approach, we find that the transport...
To enhance the signal integrity of high-density neural-sensing signals, this work presents an implantable high spatial resolution μ-probe array with through-silicon via (TSV) 2.5D integration technology that realizes a miniaturized implantable device on flexible printed circuit (FPC) interposer. The proposed microsystem was composed of two 32-channel neural sensing chips and one radio frequency chip...
We report the fabrication and wireless power coupling for a neural probe, not based on the needle geometry but a much less intrusive minimum-radius spherical pill. The pills 1.3 mm in diameter, consist of two parylene hemispherical halves which can be bonded together to enclose a bio-telemetry circuit. The two hemispheres contain feedthrough electrodes and micro coils patterned along the shell surface...
We report a force sensor array that can measure iPS cell-derived cardiomyocytes (iPS-CMs) contractility with high sensitivity and high temporal resolution. The fabricated device has six piezoresistive cantilevers whose sensitivities were higher than 9.1 × 10−5 nN−1. Using the device, we measured the contraction force of an iPS-CMs layer. As a result, contractile forces ranging from 1 to 12 nN were...
This paper presents a novel ellipsoid-shaped soft and biocompatible device which can be integrated with a percutaneous transluminal angioplasty (PTA) balloon catheter for biomedical application. The device contains a 3-dimentional electroactive polymer core element and is packaged by PDMS with villi structure around the center region of the device (Fig. 1). The core element is made of ionic polymer...
A needle type pH image sensor with 32×128 pixels for in-vivo application was developed. The pixel pitch of the sensor is 23 μm and the time resolution is about 20msec (50flame/sec). To insert in the brain of a mouse, the geometry was modified to needle structure with 1.76×11.46 mm and 100 μm thickness. The needle type pH image sensor was covered by parylene C with a thickness of 4 μm without pH sensing...
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