The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
This paper presents the integration of piezoelectrically actuated flexural plate wave devices in a custom designed fluidic cell for biosensing in liquid. The flexural plate wave devices have a wavelength of 60 μm with an antisymmetric A0 mode analytically predicted to occur at 45MHz. The flexural plate wave devices and fluidic cell are used to measure protein adsorption from solution. As a biosensing...
With the continuous development of two dimension materials technology, found that can be used in more and more application fields. The application of new sensor based on new 2D materials with higher precision has sparked an upsurge research. Here, we study by first-principles calculations the adsorption of NO and H2S gas molecules on a monolayer arsenic-phosphorus. The simulation results testify that...
We have developed a novel simulator for chemical mechanical planarization processes, based on the one variant of Monte-Carlo method. It implemented the several input parameters: pressure, diameters of abrasives, temperature, linear velocity of abrasives, and easiness to remove materials. This simulator reproduced the linear change in the amounts of the polished portions of materials with pressure*linear...
Ultrapure water contains several kinds of contaminaminants. In particular, we paid much attention to particles and investigated particles adsorption onto Si wafer. We succeed in making a model through two experiments, that is, one is to study an impact of spin cleaning parameters on particle adsorption, and the other is to study that of such impurities as urea, hydrogen peroxide, and so on.
The quality of a biosensing system relies on the interfacial properties where bioactive species are immobilized. The design of the surface includes both the immobilization of the bioreceptor itself and the overall chemical preparation of the transducer surface. Hence, the sensitivity and specificity of such devices are directly related to the accessibility and activity of the immobilized molecules...
In order to study the (√3×√3) R30°(abbr.√3) and (3×3) reconstruction structures on 6H-SiC (0001) -Si terminal after S atoms adsorption, the first-principles calculations were performed to investigate the properties of surface adsorption energy, bond lengths, bond angles, density of states, and bond population. The results show that S atoms can open the reconstruction bonds on 6H-SiC surfaces. TOP...
This paper demonstrates a novel electronic nose (e-nose) system for volatile organic compounds (VOCs) detections which is composed of three high-Q piezotransduced single-crystal silicon bulk acoustic resonators (PSBARs) and functionalized with different self-assembled monolayers (SAMs). The different sensitivities of the PSBARs to VOCs are utilized to constitute unique identification codes for IPA,...
Sulfur hexafluoride (SF6) plasmas are commonly used in the deep etching of silicon (Si), silicon oxide (SiO2) and more recently silica glass [1]. Due to the complexity of fluorinated plasma environment during Si-based material etching, there are few works presenting experimental and/or theoretical studies about the chemistry established. However, the chemical behavior of the plasma has a direct influence...
This paper reported a novel e-nose type gas sensor based on film bulk acoustic resonator (FBAR) array in which each sensor is functionalized individually by different organic monolayers. Such hybrid sensors have been successfully demonstrated for VOCs selective detections. Two concentration-independent fingerprints (adsorption energy constant and desorption rate) were obtained from the adsorption...
In this paper, we report the fabrication and experiment results of carbon nanotube (CNT) based micropreconcentrator. In our micropreconcentrator, the CNT are applied as the adsorption structures to trap and detect trace level volatile organic compounds (VOC) gas for human breath analysis. Our CNT based micropreconcentrator is designed and its performance is investigated quantitatively by simulation...
Processes that define the cantilever sensor from the front side of the wafer are designed to release the stress of the buried oxide layer and top silicon layer. This approach can be applied to enhance the performance of all the cantilever-based sensors. Then, a novel cantilever array sensor was microfabricated for precise bio-marker detection.
The mechanism of the formation of in-situ ultra thin silicon nitride (SiNx) layer (< 2 nm) on amorphous silicon (a-Si) layer has been studied by Fourier transform infra-red spectroscopy (FTIR) and X-ray photoelectron spectroscopy (XPS). The ultra-thin SiNx layers have been obtained through a hot-wire chemical vapor deposition (HWCVD) route. Approximately 1–4 nm thick films of SiNx were obtained...
The objective of this work is to study the effect of interlayer cations on the mechanism of adsorption-desorption of water in the case of a montmorillonite exchanged by alkali metals. This is done through thermodynamic measurements, i.e. isotherms of adsorption and desorption of water. The raw material is subjected to purification treatment by using the sedimentation followed by cationic exchange...
WaFLES (Water-Filled LaparoEndoscopic Surgery) is an operative method suggested by Igarashi et al., which has several advantages, such as, preventing the drying of inner organs, and being able to use ultrasound devices for real time monitoring. However, grasping of inner organs with usual forceps for move and incision purpose is difficult. Therefore our ultimate goal is to develop a small sucker manipulator...
Mass measurement of 1-kg single-crystal silicon spheres is important for precise determination of the Avogadro constant. We describe the mass measurement method and its uncertainty evaluation at the NMIJ. In addition, we report the measurement of the physical adsorption of water vapor on the surface of the silicon sphere. We also report the comparative results of 1-kg mass measurement carried out...
Graphene on SiC is studied using the first-principles calculation approach. Here, the roles of the [1–100] steps for the growth mechanism are focused on, and are discussed by comparing with the role of the [11–20] step. It has been found that the surface steps play important roles for the graphene growth. These studies provide us fundamental knowledge about the application of graphene on SiC.
Microfabricated in-plane bulk acoustic resonators can be configured as gravimetric sensors wherein the mass of surface-bound species is transduced as a shift in the resonant frequency. Using this principle, we examine the adsorption of spherical polystyrene latex particles on the resonator surface by drying particulate laden droplets. Distribution of particles on the surface is governed by the coffee-ring...
Silicene, the silicon analogy of graphene, has attracted tremendous attention. Also the formation of alloys that exist only in a confined region near the surface of materials has important technological implications. In this work, we study the structural transition for silicon adsorption on Ag(111) to form a highly ordered 2-D structure and to observe the alloy formation of Si-Ag as an example of...
This paper presents a model of the electrical transport in MIS structure of metal — thin nanoporous silicon-p-Si. The obtained analytical expressions allow analyzing the contribution of the porous silicon and surface electronic states to the electrical behavior of the structure at gas adsorption. The parameters of surface electronic states for different porous silicon thickness are obtained from analysis...
It is necessary to know the air inflow of suction cup for the designing of a new passive suction cup, which not only could easily attach and detach, but also could keep long adsorption time. This paper proposes a method to calculate the air inflow and its speed, which is easy to implement since it only requires a pressure sensor. Before calculating the air inflow, the factors affecting it should be...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.