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Journal of Microelectromechanical Systems > 2017 > 26 > 4 > 879 - 885
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 410 - 416
Journal of Microelectromechanical Systems > 2014 > 23 > 6 > 1396 - 1407
2013 IEEE SENSORS > 1 - 4