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Journal of Microelectromechanical Systems > 2017 > 26 > 4 > 879 - 885
2016 IEEE SENSORS > 1 - 3
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 1142 - 1149
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 3 > 410 - 416
Journal of Microelectromechanical Systems > 2014 > 23 > 6 > 1396 - 1407
Physics Procedia > 2014 > 55 > Complete > 113-118