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IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 2 > 301 - 311
IEEE Sensors Journal > 2008 > 8 > 8 > 1430 - 1436
IEEE Transactions on Semiconductor Manufacturing > 2014 > 27 > 2 > 301 - 311
IEEE Sensors Journal > 2008 > 8 > 8 > 1430 - 1436