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Through silicon vias (TSVs) are arranged to form a rectangular resonant cavity to improve performance of silicon based antenna in this paper. On the basis of fundamental theory of rectangular resonant cavity, the model of cavity made of through silicon vias is analyzed. Considering the size of millimeter-wave antenna, the three dimensions of cavity for mode TE101 is calculated. Applying the resonant...
This paper investigates the way of adding lumped masses on decaying time constant of the disk resonator gyroscope (DRG). Three typical ways of adding lumped masses are discussed and compared in detail. The longest decay time constant of 9.357 s is presented. In addition, this paper also demonstrates that adding lumped masses has the capability of reducing the bias and bias drift of the DRG. The figure...
We report on a progress in development of an idea that a proper arrangement of dielectric particles with a particular structural asymmetry which are made from a low-loss high-refractive-index material allows to reach high-Q trapped-mode resonant conditions in planar metamaterials in the microwave, infrared and visible parts of spectrum. In these metamaterials an electromagnetic coupling between the...
This paper presents the integration of piezoelectrically actuated flexural plate wave devices in a custom designed fluidic cell for biosensing in liquid. The flexural plate wave devices have a wavelength of 60 μm with an antisymmetric A0 mode analytically predicted to occur at 45MHz. The flexural plate wave devices and fluidic cell are used to measure protein adsorption from solution. As a biosensing...
Gastrointestinal (GI) disease is one of the most common causes of death. Capsule endoscopy (CE) may contribute to early detection of disease and pathological classification. Current CE relies on optical images of the internal luminal surface of the GI tract to aid diagnosis. With the addition of microultrasound, the imaging capability can be extended within the wall of the GI tract, with the potential...
Detection of phenylacetone is of interest as it is used as a precursor for the synthesis of (meth)amphetamine. The ability to detect illegal drugs at e.g. border crossings is valuable for governments. Capacitive Micromachined Ultrasonic Transducers (CMUTs) have previously been used to detect small amounts of analyte. If the sensitivity of the CMUT is known, the resonance shift can be used to directly...
The detection of phenylacetone is of interest as it is a common precursor for the synthesis of (meth)amphetamine. Resonant gravimetric sensors can be used to detect the mass and hereby the concentration of a gas while colorimetric arrays typically have an exceptional selectivity to the target analyte if the right colorimetric dyes are chosen. We present a sensor system consisting of a Capacitive Micromachined...
A piezoelectric micro-cantilever energy harvester was designed for a standard industry process and its expected power generation capability was simulated using two different analytical models: a simplified one-dimensional model and a circuit equivalent model. The estimated power obtained was compared with the results of similar structures published by other authors, adopting a novel performance parameter...
This paper presents the effect of elastic anharmonicity in AlN film on the nonlinear performance of extensional AlN resonators. Elastic energy distribution is tailored through dispersion engineering of the waveguide to avoid boundary-induced nonlinearities and enable the study of the elastic anharmonicity contribution on the amplitude-frequency (A-f) characteristic. A 97MHz resonator with a Q of ∼2,250...
High performance PZT-on-silicon disk flexure resonators were recently demonstrated with peak |S21| of −1 dB with direct 50 Ω termination, high bandwidth tunability, and high coupling at 22 MHz. This paper explores the performance limits and design optimization of this new resonator in the space of radius and silicon thickness of the (1,1) disk flexure mode. This effort is enabled by the Rapid Analytical/FEA...
A two dimensional (2D) length-extensional mode quartz micro-resonator has been designed and patented by ONERA. Thanks to a specific decoupling, this resonator is expected to show a very high Quality factor×Frequency product (Q.f) near the theoretical limit of 3.1013. This design offers a range of frequencies between 1 MHz up to 10 MHz, thanks to homothetic geometries with thickness ranging from 210...
This paper reports the findings of a study to characterize the resonant behavior of high-aspect ratio, NEMS-scale 3C-SiC diaphragms. The diaphragms consisted of single crystalline 3C-SiC films that were grown by APCVD and created by Si bulk micromachining. The diaphragms were excited into resonance under vacuum and assessed using optical interferometry. Over 40 resonant peaks were observed for a 250...
This work reports on the development of new AlN-based vibrational energy harvester architecture, consisting of a standard wide beam with a proof mass shaped into the Si substrate and exploiting a matrix of deep circular holes realized on the hinge backside. This approach was effective in the increase of the mechanical strain of the holed backside (HB) structure device, when compared with the standard...
In this paper, a two-dimensional photonic crystal based tunable optical filter having Si rods with different shape cavities, as H-shape, square and circular is designed and investigated. The shape of Si rods is also changed from circular to square and the shift in resonating frequency of filter is achieved. The area of each cavity has been kept constant for achieving the result. The filter is designed...
Dual-frequency (DF) solid-state lasers provide very interesting characteristics for application in Radar-Lidar, metrology or microwave photonics systems. Indeed, such lasers sustaining the oscillation of two cross-polarized modes with different frequencies provide stable and tunable optically carried microwave beat-notes [1, 2]. Nevertheless, solid-state DF lasers suffer from resonant excess intensity...
Signal and power integrity co-simulation is essential to study the impact of the power delivery network (PDN) on the performance of a high speed interface. PDN noise is directly related to its impedance profile which can be controlled by decoupling capacitors on board/package/die. In this paper we discuss the PDN impedance optimization of a mobile interface by reducing on board decoupling capacitors...
In this paper, we show a possibility of Si resonant plasma-wave transistor (R-PWT) as THz detector. Κ the channel mobility of strained Si R-PWT is 400 cm·V−1·s1, R-PWT can be operated as THz detector when channel length l= 21–28 nm.
Results obtained at integration of nano-laminated Dielectric-Metal-Dielectric (DMD) resistors in silicon MEMS sensors are presented in this paper. Fabrication technology with significantly reduced thermal budged for integration of DMD resistors in four-cantilever device has been developed. The ultrathin layers have been deposited in a consecutive RF sputtering process, without exposure to air, exploiting...
Based on the micro electronic mechanical system (MEMS) processing, a large size 2-D scanning mirror driven by electromagnetic force was designed and implemented in this paper. Here we fabricated micromirror with the silicon wafer and electroplated soft Ni film on the backside of mirror. The no-coil structural micro-mirror prevented heat produced on the mirror effectively. The scanning resonant frequency...
We report an electro-thermally tunable in-plane doubly-clamped nanoelectromechanical resonator capable of dynamically performing NOR, NOT, XNOR, XOR, and AND logic operations. Toward this, a silicon based resonator is fabricated using standard e-beam lithography and surface nanomachining of a highly conductive device layer of a silicon-on-insulator (SOI) wafer. The performance of this logic device...
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