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This work describes the integration of molecular spin crossover (SCO) compound [Fe(H2B(pz)2)2(phen)] 1 (H2B(pz)2 = dihydrobis(pyrazolyl)borate, phen = 1,10-phenantroline) into silicon MEMS with the aim to determine the mechanical properties of the SCO thin film. Analytical methods using the experimental resonance frequency before and after deposition of 1 are used to extract the elastic modulus (E)...
We show for the first time that a nanometer-scale dielectric thin film can be used as an efficient electromechanical transducer to simultaneously actuate and detect the flexural vibration of micro/nanoresonators. In this study, the first flexural vibrating mode of 16 μm long, and 350 nm-thick cantilevers are actuated by a 15 nm-thick silicon nitride layer, and detected close to resonance, at megahertz...
Here is presented a full compact system enabling the integrated actuation and measurement of the resonance frequency of piezoelectric organic MEMS resonators in liquid media. The resonators contain a piezoelectric layer made of PVDF-TrFE for both the actuation and the readout of the MEMS. They are included into a watertight enclosure associated with a PCB and a dedicated electronic card, allowing...
We report on the fabrication and characterization of lead zirconate titanate (PZT)-coated cantilever resonators for the realization of piezoelectric nanoelectromechanical systems (NEMS) with integrated actuation and detection capabilities. PZT is deposited by microcontact printing, resulting in a relatively thin PZT film without deterioration of its piezoelectric properties induced by etching damage...
The struggle against neurodegenerative diseases is one of the major challenges in the near future and the global understanding of these diseases goes through a better expertise at the single cell level of basic mechanisms involved in neuronal networks. We need to investigate closer to the cellular material and in this way, miniaturization of electronic components and emergence of nano-biotechnology...
This work deals with an acquiring system dedicated to the measurement of the resonance frequency and the quality factor of organic piezoelectric resonators. These resonators consist of a free-standing cantilever and its non-released counterpart used to compensate electrical signals that are not due to mechanical behavior. The system uses a capacitive half-bridge with two AC voltages in opposite phases,...
In this work we simultaneously aim at addressing the design and fabrication of microelectromechanical systems (MEMS) for biological applications bearing actuation and readout capabilities together with adapted tools dedicated to surface functionalization at the microscale. The biosensing platform is based on arrays of silicon micromembranes with piezoelectric actuation and piezoresistive read-out...
Chips (5mm×5mm) containing 5 self-actuated/self sensed membranes have been fabricated by standard micromachining techniques starting with a Silicon-On-Insulator wafer and their dynamic behavior in liquid media was thoroughly considered by means of analytical modeling. An extended theoretical model on the basis of H. Lamb's seminal work is validated at the microscale and allows calculating...
Sensing platforms (5mm*5mm) containing 5 piezoelectric membranes have been fabricated by standard micromachining techniques starting with a Silicon-On-Insulator wafer. Each membrane (circular, with radius varying from 360 microns to 440 microns) could be individually actuated through a PZT 1-micron thick film and sensed either via the same piezoelectric patch or via two terminal piezoresistances (obtained...
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