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This paper describes an acoustic sensor based on a single-crystal silicon diaphragm with an integrated Photonic Crystal (PC) mirror, whose deflection is measured in a Fabry-Perot resonator formed between the PC mirror and a gold coated single-mode fiber. The sensors are fabricated on standard silicon wafers, yielding monolithic, low-stress sensing diaphragms. The packaged sensor exhibits a minimum...
We present a single-mask process that combines isotropic and anisotropic etching with selective removal of passivation layers followed by hydrogen annealing to yield monolithic crystalline silicon (c-Si) devices. The process is demonstrated by creating pressure sensors that combine photonic crystal (PC) mirror pressure-sensing diaphragms with silicon-on-nothing (SON) reference cavities. The first...
Asymmetric, low-loss, Photonic Crystal mirrors exhibit negative Goos-Hänchen shift up to −16.2 μm at 1532 nm wavelength. The shift is a strong function of wavelength, polarization and incident angle.
Photonic Crystal mirrors with phase responses that are strongly varying as a function of wavenumber are designed, fabricated, and characterized. When used in Fabry-Perot resonators, these mirrors enable effective cavity lengths that are strong functions of wavenumber. Our measurements demonstrate that these cavities have very useful device applications, including wavelength-stable sensors and miniaturized...
A miniaturized Atomic Force Microscope is fabricated on the facet of an optical fiber. Photonic crystal mirrors are integrated into the fabrication creating a Fabry Perot sensor for sensitive force measurements that verify the probe's ability to resolve forces down to 8 pN/Hz0.5. This AFM form factor enables a path towards in-vivo, high-bandwidth and non-contact AFM imaging.
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