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We present a simple device architecture enabled by an effective fabrication process to realize high-Q, ultra-compact microresonators with large free spectral ranges on silicon nitride at visible wavelengths. We demonstrate Qs >60 K for microdisks with radii as small as 2.5 μm.
In this work, a typical two-dimensional (2D) material WS2 on a dielectric substrate is measured by terahertz time-domain spectroscopy (THz-TDS) and analyzed using the Drude conductivity model. The transmittance and sheet conductivity of monolayer WS2 have been obtained. This technology can be used to measure the thin film 2D materials in THz frequency regions.
It has been observed that absorbing particles accelerated by Continuous Wave (CW) lasers initiate catastrophic failure in the form of micromachined drill holes. This process was tested using stainless steel, PMMA, and silica particles with fused silica, sapphire, and spinel substrates. Hole drilling occurred at laser power densities as low as 250kW/cm2, far below the damage thresholds seen in typical...
We experimentally and theoretically analyze the role of substrate on the optical bound states in the continuum (BICs). We reveal that a high-index substrate could destroy even in-plane symmetry protected BIC due to leakage into the diffraction channels opening in the substrate. We show how two concurrent loss mechanisms scattering due to surface roughness and leakage into substrate contribute to the...
This work focuses on the fabrication of transparent piezoelectric transducers on glass substrates for ultrasonic actuation. Transparent Lead Titanate Zirconate (PZT) thin films are grown on glass following a sol-gel route and InterDigital Electrodes (IDE) are patterned by photolithography. The electrodes design aims to optimize the volume of active piezoelectric material together with the transparency...
The production of biomass by micro-organisms is of great interest in more and more industrial fields. Their culture in fedbatch bioreactors is largely used and the optimization of the influent flow rate is a major challenge to set the microorganisms in the highest performance conditions. Usually, sets of experiments are achieved to compute macroscopic models expressing the observed growth as a function...
Flame Hydrolysis Deposition (FHD) is a traditional route to deposit layers of doped silica onto the surface of a substrate for planar lightwave circuits. To form a uniform layer of fused glass the deposited soot must be consolidated, typically within a furnace at temperatures between 1200 °C and 1400 °C. This thermal processing is not localised as the temperature of the entire wafer is raised. This...
Ion implantation technique for controlling n- or p-type conduction has been a significant challenge for GaN-based high-power devices to achieve levels approaching their theoretical limits of performance. Previous studies on n-type conduction of GaN through Si ion implantation achieved 86% [1] and approximately 100% [2] of activation rate after annealing at 1250 and 1400 °C, respectively. Such high-temperature...
The aim of the research is to develop a material thickness measurement method to monitor oxide polishing by Chemical-Mechanical Planarization (CMP) during the realization of the Shallow Trench Isolation (STI). The underlying goal is to build a statistical regulation model of the polishing time on a single platen (the two others platens are monitored by an endpoint signal). In addition to the process...
Through via formation is definitely the key for coming the advanced packaging which includes heterogeneous integration and high speed wireless communication. Glass and fused silica are well known as a great candidate for a core material for high frequency application as a result of high bulk resistance and lower dielectric loss. One of the important subjects in order to use through glass vias (TGV)...
This paper presents an improved process to fabricate micro shell resonator (MSR) with eight circular-distributed T-shape masses including fused silica (FS) torch-blowing based on whirling platform and femtosecond laser ablation. The resonator is formed by micro blow torch and flowing a thin FS whirling at high speed, and ablating the eight T-shape masses using femtosecond laser. The highly symmetric...
In this work we demonstrate how a novel single free electron detector “Timed Photon Counter” (TiPC) may benefit from ultra-thin MgO transmission dynodes (tynodes). These membranes are fabricated through MEMS process technologies, with atomic layer deposition (ALD) as the most apt technique for growing films of good quality, with excellent control over thicknesses and extremely low surface roughness...
Enhancing the light absorption in ultra-thin crystalline silicon wafer based solar cell is a challenge to be met. Among several approaches and techniques to do so, the very simple yet effective technique of lensing the light into the substrate is investigated in this work. Spherical silica micro-lenses have been designed and studied. The effect of the micro-lenses has been observed for varying substrate...
This paper which is based on a project between Applied Materials and the Institute of Materials Research and Engineering (IMRE) describes a novel methodology to characterize the fracture toughness of silicon nitride (SiN) thin films deposited at ultra-low temperatures of 100–180°C by the Plasma Enhanced Chemical Vapour Deposition (PECVD) method. SiN thin films were deposited under varying conditions...
Accurate positioning of semiconductor nanowires with lasing emission at room temperature at targeted locations, onto multiple substrates and forming complex spatial patterns is demonstrated using a novel nanoscale Transfer Printing technique.
Traditional low-refraction-index devices are usually supported by a pedestals, introducing an extra air layer compared with real on-chip devices, which cannot meet the demand of optical interconnection. In this work, we proposed and experimentally demonstrated silica microtoroids bonded on high-refractive-index silicon substrate realizing good light confinement [1]. With proper microtoroid minor diameter,...
We have presented an advanced FEM simulation model that is able to map the scenario of indentation of a diamond tip into a thin brittle SiNx:H film deposited on a Si substrate. Our 2D axisymmetric and 3D quarter and half models are able to reproduce all failure modes observed in preceding indentation experiments. On the one hand, brittle fracture in both film and surface were successfully modelled...
Titanosilicate composite catalysts were synthesized from inorganic and elementorganic titania precursors and nanostructurized silicas as substrate by chemical liquid-phase deposition approach or from soluble titania and silica precursors by sol-gel process. The nature of TiO2 precursors and silica substrate affect by a level of intercomponent interactions (because of a formation of Si-O-Ti bonds was...
The resonance properties of the metasurface were obtained using the pseudo-spectral time domain method. The frequency dependence of transmission and absorption of sub-THz waves passed through metasurface have been measured.
The objective of this study is to carry out nanoscale characterization of the epoxy resin interface on silica by determining the glass-transition temperature (Tg) and molecular conformation at the interface by means of a novel non-destructive method. The Tg was determined by fluorescence lifetime measurements using evanescent wave excitation. It was revealed that the Tg of epoxy resin at a distance...
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